Digital AeroBar® with Software Control
Simco-Ion’s Digital AeroBar with Software Control Model 5225 is designed to handle the demanding
requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on
wafers, E78 compliance at the most stringent levels can be achieved.
Modulated Pulse AeroBar® for Extended ISO Class 1
The Model 5635 AeroBar MP ionizing bar is specifically designed to eliminate static charge in
semiconductor and other clean manufacturing processes where fast discharge time, low swing voltages,
and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency
sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology
enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean
emitter points and precision adjustment, provides “Extended ISO Class 1*” cleanliness, critical for
smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist
accelerates ion delivery, providing faster discharge times and performance over longer distances.
QuadBarTM with Air Assist
Simco-Ion’s QuadBarTM Ionizer with Air Assist Model 4635 provides effective static charge control in a small format. The unique Quadropole emitter point configuration enables the ionizer to be as close as 3 inches (7.6 cm) to the product. The Model 4635’s compact size is designed to fit easily into the tight confines of any process equipment. With its own independent air delivery system, the Model 4635 provides ionization where airflow is limited or unavailable.
Simco-Ion’s QuadBar Ionizer Model 4630 is the first corona ionizer to provide safe, effective static charge
control in the ambient air inside a process chamber. Its unique quadropole configuration ensures effective
ionization as close as 3 inches (7.6 cm) from the product. The 4630’s compact size is designed to fit easily
into the tight confines of any process equipment, and its ability to run on 24 VDC input power means it
can connect to a tool’s power source. In the rare event of a system failure, the QuadBar’s status output
notifies the process tool controller or a Facilities Monitoring System (FMS).
In-line Ultra-clean Nitrogen Ionizer
Simco-Ion’s In-line Ultra-clean Nitrogen Ionizer Model 4214 is specifically designed to ionize a nitrogen
gas flow in ultra-clean semiconductor or other high purity processes. Unlike other nitrogen ionizers which
depend on the trace gases in the nitrogen stream to produce ionization, this state-of-the-art product
ionizes nitrogen molecules using a small, but efficient power supply.
In-line Gas Ionizer
Most high technology manufacturers rely on air ionization to control problems associated with static
charge—thus increasing yields, minimizing down-time and microprocessor lock-up and reducing cost of
ownership. Unfortunately, mini-environments and process equipment prevent traditional ionizers from
reaching one of the most important production areas—the inside of process equipment.