For over 20 years Technical Equipment Sales, Inc. (TES) has teamed with MKS/Ion Systems to provide Ionization, Static Control, Voltage Detection & Process Environment Monitoring for high end applications throughout Semiconductor, Bio/Pharm, Aerospace and the defense industry. A representation of some of the most popular products, complete with downloadable literature and specification sheets follows, below.
AeroBar® Model 5225 Digital Ionizing Bar with Software Control
The AeroBar® Model 5225 is specifically designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, charge can be reduced to comply with E-78 Level 1, the most stringent requirement of semiconductor manufacturers. Both the Model 5225 and the Interface Module Model 5200-IM6T are CE-certified, complying with SEMI S-2 specifications.
The Model 5225 is easily integrated with your tool, using either pre-compiled routines or open-source code examples. Tight integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling. System alerts and messages are displayed at the tool controller for easy notification, taking the place of older, line signal notification systems.
Features:
• Six different bar lengths including three EFEM-specific lengths: 22, 28, 44, 64, and 84 inches with 36, 56, and 76" EFEM lengths
• Integrated software package
• Operates with Interface Module Model IM6T for power
• All parameters are settable
The Sensor Model 5200-SR operates with the Digital AeroBar Model 5225 and Interface Module Model IM6T to create a complete ionization system.
The Gas Jet AeroBar® Model 5290 functions with a continuous flow of clean dry air (CDA) or nitrogen around the emitter points, isolating and protecting them from contamination. The points can be cleaned much less frequently than with conventional ionizers, because molecular contaminants in the air stream are entrained and do not collect on the emitter points.
Features:
• Emitter points sheathed in low flow of CDA or N2
• Available with single crystal silicon emitter points
• Intrinsic airflow regulation with critical orifices at each nozzle
• High integrity, sealed gas delivery system
• Low voltage power distribution (24 VAC)
The AeroBar® Ionizer Model 5285 features a unique aerodynamic design that ionizes a local area without disrupting laminar flow, specifically designed to control static charge in mini-environments, laminar flow hoods and work stations. As with ceiling emitters, output and balance can be adjusted at each bar.
Features:
• Pulsed DC ion emission
• Emitter point spacing is optimized for uniform discharge
• Available in several lengths
• Enhanced model with ion current regulation and an alarm (Model 5285e) available.
Section 2: GENERAL PURPOSE BLOWERS AND BLOW OFF GUNS:
Section 2A: In tool blowers:
Model 6422e Small-form, In-tool Local Area Ionizing Blower
The Point-of-Use Ionizing Blower Model 6422e is the most efficient small blower of its kind for controlling static discharge in hard-to-reach areas. The Model 6422(e) meets the challenge of cost and features that your process demands by delivering worry-free ionization.
Model 6432e Benchtop or In-tool Local Area Ionizing Blower
The Local Area Ionizing Blower Model 6432e controls static discharge in assembly, inspection, packaging areas, and in-tool wherever static build-up can cause contamination, ESD, material-handling problems or microprocessor lock-up. Features:
Mounting: Small in-tool bracket/stand (1.8 x 5.1 in./45 x 129 mm); large bench top stand (4.1 x 5.1 in./ 108 x 129 mm); both with 1/4" mounting hole and 10-32 truss head screws
Section 2B: general purpose bench top and overheard blowers
Model 6442 Self-balanced Benchtop Ionizing Blower
A High Performance Ionizing Blower Occupying Minimal Workspace
The Model 6442 Bench top Blower features an adjustable two-speed fan for varying applications and operating conditions for high performance electrostatics management. The small footprint of the Model 6442 allows the ionizer to occupy much less workspace than traditional bulky blowers. With its universal mounting bracket/stand, the unit can be used to control static charge in virtually any location.
Efficient electrostatic protection over a wide area.
MKS, Ion Systems' patented IsoStat® technology guarantees intrinsically balanced ionization and eliminates complicated feedback circuits. Ionizers incorporating this technology never need calibration and require very little maintenance. IsoStat® is based on Conservation of Charge, a law of physics which states that charge cannot be created or destroyed in an isolated system. By isolating the ionizer's emitter points from ground, IsoStat® ensures equal numbers of positive and negative ions to better protect sensitive product. (Patent Number 5,055963).
The Auto-Clean System features a brush mechanism which sweeps the emitter points when the blower is turned off and on, allowing the Model 6460 to always perform at optimum output and balance. During operation of the fan, the brush automatically retracts to prevent emitter point wear. The Auto-Clean System brush will extend as the fan slows to a stop. Ion Systems recommends activating the Auto-Clean System at least once a week. Cleaning schedules will vary depending on environmental conditions and application requirements. This automated feature results in reduced operation costs due to lower maintenance.
The TurboBlower was developed to address the ionization protection requirements of both the Electronic Manufacturing Services industry and the module assembly and test processes found in the Flat Panel Display (FPD) industry. The light weight of the blower allows overhead mounting configurations, resulting in greater ion coverage and the greatest possible zone of protection. Features:
120V or 230V versions
Minimum 90 x 125 cm (36 x 48 in.) area with discharge time of under 10 seconds
1 second at 30 cm (1 ft) centerline and under 2.5 seconds at 30 cm (1 foot) corners, typical, 120 VAC model. (230 VAC model slightly longer)
Section 2C: Narrow tolerance blowers (primarily for the disc drive industry)
Model 5802i Critical Environment Benchtop Ionizer with Sensor Input
The Critical Environment Ionizer Model 5802i provides reliable, fast static charge control for bench top work areas and small spaces, allowing optimal electrostatics management that minimizes cost and maximizes protection for ESD-sensitive areas. An internal automatic balance correction system ensures ionization continues to reach your target with complete accuracy.
Maintaining better than ±1 volt (or ±3 volts without sensor) balance, the Model 5802i is an ideal solution for sensitive applications. Connected to an external sensor at the target area, the Model 5802i delivers precise balance while remaining space efficient. Automatic correction of offset balance reduces maintenance and adjustment costs, presenting a significant time and costs savings.
Model 5810i Overhead Critical Environment Ionizer with Sensor Input
The Critical Environment Ionizer Model 5810i is an innovative electrostatics management solution engineered for the needs of today's clean rooms. Designed and tested to meet Class 10 clean room requirements (configuration dependent) and the tightest balance specifications, the Model 5810i can operate with external sensors to maintain precise balance (better than ±1 volt) by altering ion output and adapting to environment changes. With the established reliability of steady-state DC, the established method for eliminating the effects of ESD and ESD-induced electromagnetic interference (EMI) in high-tech facilities, the Model 5810i delivers maximum ion output where and when you need it.
Features:
Aluminum chassis (Model 5810i) or stainless steel (Model 5810is)
The powerful ionizing blow-off gun that works with you, not against you. Easy Operation
The AirForce was designed with the operator in mind. The AirForce's lightweight, flexible air hose-just 3/8" in diameter-moves with the operator and makes work easier. No high voltage cable means improved operator safety. The gun's ergonomic design-with a light touch trigger and easy-view LED-minimizes fatigue and eliminates wrist hyperextension. The compact console can be mounted anywhere, so it doesn't take up valuable workspace but is still easily accessible. To make the work environment more pleasant, the AirForce also features low audible noise.
Model 5515 Ceiling Emitter Digital Ionization Room System with Software Control
The newest additions to our digital family of Ceiling Emitters and Controllers, the Model 5515 Ceiling Emitter and the Model 5582 Controller, are designed to integrate with IonManager software, the most comprehensive and robust ionizer management software available. This digital room ionization system allows the flexibility to remotely and individually control and address system operational settings including alarm sensitivity, ion output, ion pulse timing, and polling frequency. Easy to use tools with precision fine tuning allows your ionization system to achieve maximum performance, specially calculated for your specific application.
The integrated software control and monitoring capability of IonManager enables centralized control of individual Emitters and Controllers. Each individual Emitter may also be set with the Model 5572 remote control, or by using the Model 5571 handheld terminal connected to the Controller. Any status issues from an Emitter or Controller are reported back to IonManager, which can send messages following a customized set of rules.
Features & Benefits:
Fully digital technology
Available with single crystal silicon emitter points
Advanced Feedback Technology
Flexible user configuration, with adjustments made via IR Remote, IonManager software, or Handheld Terminal
Current and voltage-controlled performance
Precisely control all ionization parameters with expansive data output capabilities Emitter point material is the cleanest, highest performing, and lowest maintenance available, essential for 65 nm and below wafer processing
Continued stable high ion output is ensured, along with the most balanced ionization performance possible
Model 5511 Ceiling Emitter Digital Ionizer The Digital Ceiling Emitter Model 5511 provides uniform ionization throughout the open areas of a clean room. Powered by the Model 5580 or 5520 controllers with digital technology, the Model 5511 is a complete communication system enabling either centralized control of individual emitters through bi-directional communication, or direct field programmability of the ceiling emitters with the Model 5570 hand held infrared (IR) remote control. Features:
Creates a room system along with a Controller Model 5520 or 5580, and Hand held Remote Model 5570
Ideal in photolithography and mask processes
Varying rod lengths
Patented pulsed DC technologies with local and system-wide adjustment controls
The Ceiling Emitters Model 5509 provides uniform ionization throughout the open areas of a clean room. Mounted onto the ceiling surface or inside a flush mount channel, Model 5509 ceiling emitter maintains aesthetics without disrupting clean room laminar airflow or compromising the integrity of operating Class 1 clean rooms. In a matter of seconds, the Model 5509(e) ceiling ionization system eliminates ESD and particle contamination.
Features:
Low voltage operation (24 VAC)
Individually adjustable ion emission output
Feedback with alarms available at each emitter
Patented pulsed DC technologies with local and system-wide adjustment controls
Section 4: in-line and specialty ionizers
4A: In-line ionizers
Model 4210 In-line Gas Ionizer
The In-line Gas Ionizer Model 4210 pipes compressed ionized gas for balanced charge neutralization in the heart of process equipment, where limited space or proximity to sensitive products makes ionizing bars impractical. Either Clean Dry Air (CDA) or nitrogen can be ionized, depending on process requirements.
Features:
Directly connects to delivery manifolds
IsoStat® technology (never needs balancing)
Steady-state DC ion emission
Single crystal silicon emitter points (U/un models)
Compressed air ionizing cartridge can be used for in-line equipment ionization or as an ionizing blow-off gun. Air Ionizing Cartridge
The self-contained compressed air ionizing cartridge controls static charge in production, packaging, laboratory and other environments where static build-up can cause contamination, ESD, material handling problems or microprocessor lock-up. Compact and rugged, the cartridge can be used either for in-line ionization or as an ionizing blow-off gun. For in-line use, connect the 6110 to a compressed air source and it is ready to ionize any type of production equipment. Or attach the 6110 to an ordinary air gun and the air stream is ionized for effective particle removal. An internal sensor initiates ionization only when the gun is triggered, ensuring on-demand control of static charge. Patented IsoStat® Technology
The patented IsoStat® Technology guarantees intrinsically balanced ionization and eliminates complicated feedback circuits. Ionizers incorporating this technology never need calibration and require very little maintenance. IsoStat® is based on a law of physics, Conservation of Charge, which states that charge cannot be created or destroyed in an isolated system. By isolating the ionizer's emitter points from ground, IsoStat® ensures equal numbers of positive and negative ions.
The QuadBar™ Ionizer Model 4630 provides safe, effective static charge control in the ambient air inside a process chamber. Its unique quadrupole configuration ensures effective ionization as close as 3 inches (7.6 cm) from the product. The 4630's compact size is designed to fit easily into the tight confines of any process equipment, and 24 VAC input power means it can connect to a tool's power source. In the rare event of a system failure, the QuadBar's status output notifies the process tool controller or a Facilities Monitoring System (FMS).
QuadBar™ Model 4632 Compact 24 VAC/VDC Ionizer with Air Assist
The QuadBar™ Ionizer with Air Assist Model 4632 provides safe, effective static charge control independent of process air flow. A patented-pending cross-channel air cartridge built around the emitter points provides an independent air delivery system for tight confines where airflow is not adequate or is missing. With the air delivery system providing a protective sheath around the emitter points, cleaning periods are extended.
Features:
Alarm option (Model 4632e)
IsoStat® Technology
24 VAC, 35 mA, when used with Ion's 14-1535 transformer or Controller Model 4030, or a properly grounded 24 VAC power supply
Can be mounted to any process tool or flow hood using four #6 screws
Model 4610 High Temperature Ionizer with Controller
The High Temperature Ionization System consists of the High Temperature Ionizer Model 4610TF and the High Temperature Controller Mode 4052e. The system neutralizes static charge in environments with extreme conditions.
Features:
Withstands temperatures up to 302°F (150°C) and down to -94°F (-70°C)
Patented IsoStat® Technology
Single-crystal silicon or tungsten alloy emitter points
Affordable, Single-fan Field Charge Sensor The Novx Series 3150 is an affordable field charge sensor and controller. It will provide the flexibility to precisely monitor and control an ionizer with a programmable monitor and has application for stand-alone field charge detection for realtime monitoring and alarm. Data output from this instrument provides a proactive solution when interfaced. Report alarm conditions to other Novx instruments and/or connect directly to PEMS to report warning or alarm conditions for process control.
Features & Benefits:
Field charge detection
Ionizer balance detection
Closed-loop control
Audible alarm
Programmable warning and alarm set points
LEDs for in-balance warning and alarm
Powered by ionizer
Small footprint and light weight
Digital controller
Microprocessor-based
Integral antenna/sensor
Reduce process variations and provide continuous monitoring
Control ionizer balance to +/-0.2V
Consistent cost and performance advantages over any other possible solution
Novx Series 3350/3360 Multi-fan, Closed-loop Ionizer Controllers
Passive/Active Multifan Controllers The Novx Series 3350 (Passive) and Series 3360 (Active) are multi-fan, closed-loop ionizer controllers which allow the customer the flexibility to control multiple fans with a cost-effective solution where multiple fans are required. Data output from this instrument provides a proactive solution when interfaced. Report alarm conditions to other Novx instruments and/or connect directly to PEMS to report warning or alarm conditions for process control.
Features & Benefits:
Digital controllers
Microprocessor-based
Monitor up to 3 ionizer fans
Passive and active detection
Programmable closed-loop control
Multichannel, digital I/O
Auxiliary I/O
Voltage/polarity displays
Local addressability
Programmable alarm set points
Local red/green LEDs for each channel
RS-485 and Modbus data output
Data reporting and proactive control to the monitoring system.
Direct communication to PEMS.
Reduce process variations, decrease scrap/rework and improve process yields.
Evaluating and reporting ionizer performance down to a tenth of a volt.
Consistent cost/performance advantages over any other possible solution.
Decay testing without the added expense of a CPM.
Bi-directional communication for proactive control.
The Point-of-Use Ionizing Blower Model 6422e is the most efficient small blower of its kind for controlling static discharge in hard-to-reach areas. The Model 6422(e) meets the challenge of cost and features that your process demands by delivering worry-free ionization.
The Local Area Ionizing Blower Model 6432e controls static discharge in assembly, inspection, packaging areas, and in-tool wherever static build-up can cause contamination, ESD, material-handling problems or microprocessor lock-up.
A High Performance Ionizing Blower Occupying Minimal Workspace
Efficient electrostatic protection over a wide area.
The TurboBlower was developed to address the ionization protection requirements of both the Electronic Manufacturing Services industry and the module assembly and test processes found in the Flat Panel Display (FPD) industry. The light weight of the blower allows overhead mounting configurations, resulting in greater ion coverage and the greatest possible zone of protection.
The Critical Environment Ionizer Model 5802i provides reliable, fast static charge control for bench top work areas and small spaces, allowing optimal electrostatics management that minimizes cost and maximizes protection for ESD-sensitive areas. An internal automatic balance correction system ensures ionization continues to reach your target with complete accuracy.
The Critical Environment Ionizer Model 5810i is an innovative electrostatics management solution engineered for the needs of today's clean rooms. Designed and tested to meet Class 10 clean room requirements (configuration dependent) and the tightest balance specifications, the Model 5810i can operate with external sensors to maintain precise balance (better than ±1 volt) by altering ion output and adapting to environment changes. With the established reliability of steady-state DC, the established method for eliminating the effects of ESD and ESD-induced electromagnetic interference (EMI) in high-tech facilities, the Model 5810i delivers maximum ion output where and when you need it.
The powerful ionizing blow-off gun that works with you, not against you.
The newest additions to our digital family of Ceiling Emitters and Controllers, the Model 5515 Ceiling Emitter and the Model 5582 Controller, are designed to integrate with IonManager software, the most comprehensive and robust ionizer management software available. This digital room ionization system allows the flexibility to remotely and individually control and address system operational settings including alarm sensitivity, ion output, ion pulse timing, and polling frequency. Easy to use tools with precision fine tuning allows your ionization system to achieve maximum performance, specially calculated for your specific application.
The Digital Ceiling Emitter Model 5511 provides uniform ionization throughout the open areas of a clean room. Powered by the Model 5580 or 5520 controllers with digital technology, the Model 5511 is a complete communication system enabling either centralized control of individual emitters through bi-directional communication, or direct field programmability of the ceiling emitters with the Model 5570 hand held infrared (IR) remote control.
The Ceiling Emitters Model 5509 provides uniform ionization throughout the open areas of a clean room. Mounted onto the ceiling surface or inside a flush mount channel, Model 5509 ceiling emitter maintains aesthetics without disrupting clean room laminar airflow or compromising the integrity of operating Class 1 clean rooms. In a matter of seconds, the Model 5509(e) ceiling ionization system eliminates ESD and particle contamination.
The In-line Gas Ionizer Model 4210 pipes compressed ionized gas for balanced charge neutralization in the heart of process equipment, where limited space or proximity to sensitive products makes ionizing bars impractical. Either Clean Dry Air (CDA) or nitrogen can be ionized, depending on process requirements. 
Air Ionizing Cartridge
The QuadBar™ Ionizer Model 4630 provides safe, effective static charge control in the ambient air inside a process chamber. Its unique quadrupole configuration ensures effective ionization as close as 3 inches (7.6 cm) from the product. The 4630's compact size is designed to fit easily into the tight confines of any process equipment, and 24 VAC input power means it can connect to a tool's power source. In the rare event of a system failure, the QuadBar's status output notifies the process tool controller or a Facilities Monitoring System (FMS).
The QuadBar™ Ionizer with Air Assist Model 4632 provides safe, effective static charge control independent of process air flow. A patented-pending cross-channel air cartridge built around the emitter points provides an independent air delivery system for tight confines where airflow is not adequate or is missing. With the air delivery system providing a protective sheath around the emitter points, cleaning periods are extended.
The High Temperature Ionization System consists of the High Temperature Ionizer Model 4610TF and the High Temperature Controller Mode 4052e. The system neutralizes static charge in environments with extreme conditions.
The Novx Series 3150 is an affordable field charge sensor and controller. It will provide the flexibility to precisely monitor and control an ionizer with a programmable monitor and has application for stand-alone field charge detection for realtime monitoring and alarm. Data output from this instrument provides a proactive solution when interfaced. Report alarm conditions to other Novx instruments and/or connect directly to PEMS to report warning or alarm conditions for process control.
The Novx Series 3350 (Passive) and Series 3360 (Active) are multi-fan, closed-loop ionizer controllers which allow the customer the flexibility to control multiple fans with a cost-effective solution where multiple fans are required. Data output from this instrument provides a proactive solution when interfaced. Report alarm conditions to other Novx instruments and/or connect directly to PEMS to report warning or alarm conditions for process control.