Tes Clean Air Systems is a division of Tes Equipment Sales. We are a unique supplier of standard and custom engineered Fan Filter Units (FFU), for Semiconductor Process Tool Front End, Semiconductor Equipment Front End Module EFEM, OEM memory, Mini Environment and Pharmaceutical applications.

Our application engineering staff has unmatched experience in the design of HEPA, ULPA, and PTFE media Fan Filter Units (FFU), into applications such as the Mini Environment, Semiconductor Process Tool Front End and Equipment Front End Module EFEM. Unlike Mass produced clean room construction Fan Filter Units (FFU), like the MAC-10 that are produced hundreds at a time, our line of custom Fan Filter Units (FFU) are individually designed and engineered to your exacting specifications.

High volume units, like the MAC-10, are used in the marketplace for construction applications where a generic HEPA , ULPA or PTFE media Fan Filter module is required. However, units like the MAC-10 cannot offer the custom sizing and features that we can design into your product for a Mini Environment, Semiconductor Equipment Front End Module EFEM or Semiconductor Process Tool Front End application.

In addition to providing specialized designs in the area of HEPA, ULPA and PTFE media air filtration, we offer the ability to integrate applicable Ion Systems ionization products into our “Clean Air Systems” designs. Ion Systems is the premier supplier of ionization for high end applications, offering products that deal both with ESA and ESD related issues. Ion Systems is a recognized leader both in the technology and application of ionization in clean room related fields.

In addition to the above mentioned products we offer extensive capability to test finished product performance for particulate level, particles added per wafer pass, airflow uniformity, and airflow recovery. E78 audits are offered as a service as well.
 

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